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Proceedings Paper

Pulsed VUV sources and their application to surface cleaning of optical materials
Author(s): Deb M. Kane; D. Hirschausen; B. K. Ward; Robert J. Carman; Richard P. Mildren
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Paper Abstract

Development of pulsed excitation techniques for high-pressure dielectric barrier discharges (DBD) has led to a short-pulsed, high-peak-power, spatially uniform source of UV7VUV radiation -- a preferred type of output for materials processing and many other applications. Results of such a Xe2* DBD source at 172 nm for removing mountants from optical surfaces and for removing hydrocarbon contamination from optical and polymer surfaces are presented.

Paper Details

Date Published: 2 April 2004
PDF: 7 pages
Proc. SPIE 5399, Laser-Assisted Micro- and Nanotechnologies 2003, (2 April 2004); doi: 10.1117/12.552735
Show Author Affiliations
Deb M. Kane, Macquarie Univ. (Australia)
D. Hirschausen, Macquarie Univ. (Australia)
B. K. Ward, Macquarie Univ. (Australia)
Robert J. Carman, Macquarie Univ. (Australia)
Richard P. Mildren, Macquarie Univ. (Australia)


Published in SPIE Proceedings Vol. 5399:
Laser-Assisted Micro- and Nanotechnologies 2003
Vadim P. Veiko, Editor(s)

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