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Proceedings Paper

The development of back-supportless CCDs and the wideband hybrid X-ray imager for the NeXT satellite
Author(s): Shin-ichiro Takagi; Takeshi Go Tsuru; Hironori Matsumoto; Katsuji Koyama; Hiroshi Tsunemi; Emi Miyata; Satoshi Miyazaki; Yukiko Kamata; Kazuhisa Miyaguchi ; Masaharu Muramatsu; Hisanori Suzuki
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Paper Abstract

The NeXT (New X-ray Telescope) satellite to be launched around 2010, has a large effective area in the 0.1-80 keV band with the use of the multilayer super mirror. As the focal plane detector for NeXT, we have been developing the Wideband hybrid X-ray Imager (WXI) consisting of X-ray CCDs and a hard X-ray imager placed under X-ray CCDs. The X-ray CCD of WXI is required to (1) keep the high quantum efficiency up to the high energy band and (2) pass hard X-rays unabsorbed in the depletion (sensitive) layer. In order to meet these requirements, we have been developing the back supportless CCD which has the thick depletion layer, thinned Si wafer and back supportless structure. As the first step, we make the test model with thinned Si wafer in order to (1) learn the handling and thinning process and (2) confirm no change of the performance after the thinning process. The test model has the pixel number and size of 512 x 512 and 24 x 24 μm, respectively. We select the thickness of the wafer is about 200 μm considering the thinning process. We verify the depletion layer and the wafer of the test model are about 65 and 190 μm in thickness, respectively. The energy resolution is about 144 eV at 5.9 keV which is substantially comparable to the un-thinned CCD, hence we confirm our thinning process has no effect on the perfomance. In order to reduce the dead layer ompletely and increase the quantum efficiency at the high energy band, we are also developing the full depleted X-ray CCD with the high resistivity N-type Si wafer.

Paper Details

Date Published: 29 September 2004
PDF: 10 pages
Proc. SPIE 5501, High-Energy Detectors in Astronomy, (29 September 2004); doi: 10.1117/12.552514
Show Author Affiliations
Shin-ichiro Takagi, Kyoto Univ. (Japan)
Takeshi Go Tsuru, Kyoto Univ. (Japan)
Hironori Matsumoto, Kyoto Univ. (Japan)
Katsuji Koyama, Kyoto Univ. (Japan)
Hiroshi Tsunemi, Osaka Univ. (Japan)
Emi Miyata, Osaka Univ. (Japan)
Satoshi Miyazaki, National Astronomical Observatory of Japan (Japan)
Yukiko Kamata, National Astronomical Observatory of Japan (Japan)
Kazuhisa Miyaguchi , Hamamatsu Photonics K.K. (Japan)
Masaharu Muramatsu, Hamamatsu Photonics K.K. (Japan)
Hisanori Suzuki, Hamamatsu Photonics K.K. (Japan)

Published in SPIE Proceedings Vol. 5501:
High-Energy Detectors in Astronomy
Andrew D. Holland, Editor(s)

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