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Proceedings Paper

Interferometers with diffraction on dot aperture for testing of shape errors of precise surfaces
Author(s): Vladimir K. Kirillovsky; Nikolay B. Voznesensky; Michail M. Troukhine; Kyeong-Hee Lee
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Paper Abstract

Modern approach to the optical investigation of optical systems of the highest precision is considered. Lack of classical interferometers is the necessity of presence for their schematics the reference optical element, so its accuracy is limited always. However for the testing of optical systems and elements of the best class the devices ensuring accuracy at a level 1/100 - 1/200 λ are necessary. It is on the order more exact than the traditional. As the alternative, the concept of the interferometer with diffracted reference wavefront [point diffraction (PDI) --interferometer] is offered. In this research the schematic of PDI-interferometer with basic front, common for working and observant branches, is developed. The errors are reduced. The flexibility and universality of an interferometer are achieved. The accuracy, simplicity and profitability are increased. The adjusting is simplified.

Paper Details

Date Published: 2 April 2004
PDF: 11 pages
Proc. SPIE 5399, Laser-Assisted Micro- and Nanotechnologies 2003, (2 April 2004); doi: 10.1117/12.552324
Show Author Affiliations
Vladimir K. Kirillovsky, St. Petersburg State Institute of Fine Mechanics and Optics (Russia)
Nikolay B. Voznesensky, St. Petersburg State Institute of Fine Mechanics and Optics (Russia)
Michail M. Troukhine, St. Petersburg State Institute of Fine Mechanics and Optics (Russia)
Kyeong-Hee Lee, Korea Electrotechnology Research Institute (South Korea)

Published in SPIE Proceedings Vol. 5399:
Laser-Assisted Micro- and Nanotechnologies 2003
Vadim P. Veiko, Editor(s)

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