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Proceedings Paper

Absolute distance measurements with micrometer resolution using white-light spectral interferograms processed by a phase-locked loop method
Author(s): Petr Hlubina; Vladimir Chugunov; Igor P. Gurov
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Paper Abstract

A new spectral-domain interferometric method of measuring absolute distances is utilized when the effect of low dispersion in an interferometer is known and the spectral interference fringes are resolved over a wide spectral range. First, processing the recorded spectral interferograms by a phase-locked loop (PLL) method, which is a special simplified version of the general recurrence non-linear data processing method, the unmodulated spectrum, the spectral fringe visibility function and the unwrapped spectral fringe phase function are obtained. Then, knowing the dispersion relation for the material present in the interferometer, the material effective thickness is determined. Finally, the positions of the interferometer mirror are determined precisely by fitting the recorded spectral interferograms to the theoretical ones knowing all the mentioned spectral functions.

Paper Details

Date Published: 2 April 2004
PDF: 8 pages
Proc. SPIE 5399, Laser-Assisted Micro- and Nanotechnologies 2003, (2 April 2004); doi: 10.1117/12.552313
Show Author Affiliations
Petr Hlubina, Silesian Univ. Opava (Czech Republic)
Vladimir Chugunov, St. Petersburg State Institute of Fine Mechanics and Optics (Russia)
Igor P. Gurov, St. Petersburg State Institute of Fine Mechanics and Optics (Russia)

Published in SPIE Proceedings Vol. 5399:
Laser-Assisted Micro- and Nanotechnologies 2003
Vadim P. Veiko, Editor(s)

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