Share Email Print
cover

Proceedings Paper

Development of fully depleted back-illuminated charge-coupled devices
Author(s): Christopher J. Bebek; Donald E. Groom; Stephen E. Holland; Armin Karcher; William F. Kolbe; Nick P. Palaio; Natalie A. Roe; Bojan T. Turko; Guobin Wang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The status of CCD development efforts at Lawrence Berkeley National Laboratory is reviewed. Fabrication technologies for the production of back-illuminated, fully depleted CCD's on 150 mm diameter wafers are described. In addition, preliminary performance results for high-voltage compatible CCD's, including a 3512 x 3512, 10.5 μm pixel CCD for the proposed SuperNova Acceleration Probe project, are presented.

Paper Details

Date Published: 29 September 2004
PDF: 11 pages
Proc. SPIE 5499, Optical and Infrared Detectors for Astronomy, (29 September 2004); doi: 10.1117/12.552295
Show Author Affiliations
Christopher J. Bebek, Lawrence Berkeley National Lab. (United States)
Donald E. Groom, Lawrence Berkeley National Lab. (United States)
Stephen E. Holland, Lawrence Berkeley National Lab. (United States)
Armin Karcher, Lawrence Berkeley National Lab. (United States)
William F. Kolbe, Lawrence Berkeley National Lab. (United States)
Nick P. Palaio, Lawrence Berkeley National Lab. (United States)
Natalie A. Roe, Lawrence Berkeley National Lab. (United States)
Bojan T. Turko, Lawrence Berkeley National Lab. (United States)
Guobin Wang, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 5499:
Optical and Infrared Detectors for Astronomy
James D. Garnett; James W. Beletic, Editor(s)

© SPIE. Terms of Use
Back to Top