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Proceedings Paper

3D microstructuring of glass by femtosecond laser direct-writing for micro-TAS application
Author(s): Koji Sugioka; Ya Cheng; Masashi Masuda; Katsumi Midorikawa; Kazuhiko Shihoyama
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Paper Abstract

Three-dimensional (3-D) microstructuring of photosensitive glass is demonstrated by using femtosecond (fs) laser for Lab-on-chip, in other words, micro total analysis system (μ-TAS), application. The fs laser direct-write process followed by a thermal treatment and chemical etching in a HF aqueous solution produces true 3-D hollow microstructures embedded in the photosensitive glass. This technique is applied for manufacturing a microfluidic structure inside the glass. Mixing of two kinds of aqueous solutions is demonstrated in the fabricated structure. A freely movable microplate is also fabricated inside glass to control a stream of reagents in the microfluidics. In the meanwhile, this technique is applied for integrating microoptics like micromirror and micro beam splitter in the glass chip for optical analysis of reactants produced in the microfluidics. This paper also discusses the mechanism of fs laser and photosensitive glass interaction.

Paper Details

Date Published: 2 April 2004
PDF: 10 pages
Proc. SPIE 5399, Laser-Assisted Micro- and Nanotechnologies 2003, (2 April 2004); doi: 10.1117/12.552286
Show Author Affiliations
Koji Sugioka, RIKEN-The Institute of Physical and Chemical Research (Japan)
Ya Cheng, RIKEN-The Institute of Physical and Chemical Research (Japan)
Masashi Masuda, RIKEN-The Institute of Physical and Chemical Research (Japan)
Katsumi Midorikawa, RIKEN-The Institute of Physical and Chemical Research (Japan)
Kazuhiko Shihoyama, HOYA Photonics Corp. (Japan)

Published in SPIE Proceedings Vol. 5399:
Laser-Assisted Micro- and Nanotechnologies 2003
Vadim P. Veiko, Editor(s)

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