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Proceedings Paper

Approximation of electron beam energy loss in homogeneous semiconducting materials
Author(s): M. A. Stepovich; A. G. Khokhlov; A. A. Samokhvalov; M. M. Tchaikovsky
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Paper Abstract

It's shown that modified Laguerre's functions can be used for approximation of electron beam energy loss distribution in semiconductors under the consideration of modificating parameter appropriate choice.

Paper Details

Date Published: 1 March 2004
PDF: 7 pages
Proc. SPIE 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 March 2004); doi: 10.1117/12.552158
Show Author Affiliations
M. A. Stepovich, Bauman Moscow State Technical Univ. (Russia)
A. G. Khokhlov, Bauman Moscow State Technical Univ. (Russia)
A. A. Samokhvalov, Bauman Moscow State Technical Univ. (Russia)
M. M. Tchaikovsky, Bauman Moscow State Technical Univ. (Russia)


Published in SPIE Proceedings Vol. 5398:
Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev, Editor(s)

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