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Proceedings Paper

Electron beam with homogeneous solids interaction simulation using Monte-Carlo method in discrete looses approximation
Author(s): S. S. Borisov; Eugene A. Grachev; S. I. Zaitsev
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Paper Abstract

Problems of backscattered and true-secondary spectra as far as transmission spectra simulation using discrete looses approximation are regarded in this article. Developed model allows acquiring the electron energy spectra from samples with complicated 3-d structure. Besides due to higher detailing of the discrete looses method one can evaluate the spatial energy and accumulated charge distributions more accurately. Simulation results are compared with the experimental ones, SEM image simulation examples are given.

Paper Details

Date Published: 1 March 2004
PDF: 8 pages
Proc. SPIE 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 March 2004); doi: 10.1117/12.552147
Show Author Affiliations
S. S. Borisov, Moscow State Univ. (Russia)
Eugene A. Grachev, Moscow State Univ. (Russia)
S. I. Zaitsev, Institute of Problems of Microelectronics Technology (Russia)


Published in SPIE Proceedings Vol. 5398:
Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev, Editor(s)

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