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Proceedings Paper

Spread function and limit resolution of deflecting electrostatic energy analyzers
Author(s): Boris G. Freinkman; Edward I. Rau; S. I. Zaytsev
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Paper Abstract

The spread function of electrostatic analyzers plays a key role in reconstructing the electron spectrum. The paper takes the toroidal energy analyzer as an example to simulate the work of its electron optical system and calculate the spread function of the limit resolution of deflecting electrostatic energy analyzers. The relationship between the spread function of the electrostatic analyzer and the source size and position, the width of the entrance and exit slits, the aberration coefficients of its electron optical system, and positioning errors is determined. As the dispersion depends on the relative difference between particle energy and energy settings, the fundamental spectrometric equation for the electrostatic energy analyzer is shown to look like heterogeneous convolution. For this reason the resolution of the analyzer falls with the growing operating voltage and can only be analyzed by using the local modulation transfer function, which is Fourier-series expansion of the spread function at a specific operating voltage. The energy spectrum free from phase errors is shown to determine the limit resolution. The resolution as function of the exit slit width, control voltage and contrast is defined.

Paper Details

Date Published: 1 March 2004
PDF: 7 pages
Proc. SPIE 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 March 2004); doi: 10.1117/12.552041
Show Author Affiliations
Boris G. Freinkman, Institute of Problems of Microelectronics Technology (Russia)
Edward I. Rau, Institute of Problems of Microelectronics Technology (Russia)
S. I. Zaytsev, Institute of Problems of Microelectronics Technology (Russia)


Published in SPIE Proceedings Vol. 5398:
Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev, Editor(s)

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