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Proceedings Paper

Ion-beam energy spectrum monitoring system
Author(s): A. N. Kozlov; V. D. Smolyaninov; A. P. Eremin; Anatoly M. Filachev
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Paper Abstract

Absence of the ion beam monitoring facilities restricts using ion beams for treatment of materials. One of the important ion beam parameters to be measured is the ion energy. In the paper considered are the principles of ion energy distribution monitoring. The described construction allows to choose properly the working mode of ion sources for material treatment.

Paper Details

Date Published: 1 March 2004
PDF: 5 pages
Proc. SPIE 5398, Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics, (1 March 2004); doi: 10.1117/12.552027
Show Author Affiliations
A. N. Kozlov, Research Institute for Electron and Ion Optics (Russia)
V. D. Smolyaninov, Research Institute for Electron and Ion Optics (Russia)
A. P. Eremin, Research Institute for Electron and Ion Optics (Russia)
Anatoly M. Filachev, RD&P Ctr. ORION/State Scientific Ctr. (Russia)


Published in SPIE Proceedings Vol. 5398:
Sixth Seminar on Problems of Theoretical and Applied Electron and Ion Optics

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