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Proceedings Paper

High-efficiency multilayer-coated polymer-overcoated blazed ion-etched holographic gratings for high-resolution EUV astronomical spectroscopy
Author(s): Michael P. Kowalski; Raymond G. Cruddace; Troy W. Barbee; William R. Hunter; Klaus F. Heidemann; Bruno Nelles; Ralf Lenke; Holger Kierey
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Paper Abstract

We have measured the topography and near-normal incidence EUV efficiency of five flat multilayer-coated polymer-overcoated blazed ion-etched holographic test gratings. Blaze angles were in the range 2.0-4.1°. All gratings had a surface roughness <3 Å rms (20-4000 Å). The best grating had a measured efficiency of 29.9% in the second order at 157.9 Å and a derived groove efficiency of 53.0%. At the shortest wavelength investigated (100.0 Å) another grating produced a measured efficiency in the first order of 12.9% and a derived groove efficiency of 33.6%. In third order another grating produced a measured efficiency at 137.8 Å of 13.4% and a derived groove efficiency of 21.8%. To the best of our knowledge these values exceed previous published results. Some issues remain that may be associated with modification of the groove profile by the multilayer coating.

Paper Details

Date Published: 11 October 2004
PDF: 12 pages
Proc. SPIE 5488, UV and Gamma-Ray Space Telescope Systems, (11 October 2004); doi: 10.1117/12.551304
Show Author Affiliations
Michael P. Kowalski, Naval Research Lab. (United States)
Raymond G. Cruddace, Naval Research Lab. (United States)
Troy W. Barbee, Lawrence Livermore National Lab. (United States)
William R. Hunter, SFA, Inc. (United States)
Klaus F. Heidemann, Carl Zeiss Laser Optics GmbH (Germany)
Bruno Nelles, Carl Zeiss Laser Optics GmbH (Germany)
Ralf Lenke, Carl Zeiss Laser Optics GmbH (Germany)
Holger Kierey, Carl Zeiss Laser Optics GmbH (Germany)


Published in SPIE Proceedings Vol. 5488:
UV and Gamma-Ray Space Telescope Systems
Guenther Hasinger; Martin J. L. Turner, Editor(s)

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