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Proceedings Paper

Realization of a large-area microbolometer sensor array for submillimeter astronomy applications: SCUBA-2
Author(s): William Parkes; Alan M. Gundlach; Camelia C. Dunare; Jon G. Terry; J. Tom M. Stevenson; Anthony J. Walton; Eric Schulte
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Paper Abstract

The realization of a large (40x32) pixel sub-array on a 3-inch silicon wafer brings unique challenges involving the integration of a variety of microfabrication techniques. Design, development and fabrication procedures are described, with conventional MEMS techniques in silicon being used where possible. High resolution imaging in the sub-millimetre range requires a pixel size of the order of one millimetre with a high signal/noise ratio detector, which must be addressed at cryogenic temperatures via a very low noise amplifying system. This has been realized using a combination of Transition Edge Sensors (TES) with amplification and multiplexing (MUX) by Superconducting Quantum Interference Devices (SQUID), which imposes particular requirements in the method of construction. This paper describes the details of the technologies used to overcome the conflicting demands of the different elements. The need to operate at millikelvin temperatures limits the materials that can be selected. Particular attention has been paid to the stresses induced in the structure by overlying films, bump bonding and any thermal processing.

Paper Details

Date Published: 8 October 2004
PDF: 9 pages
Proc. SPIE 5498, Millimeter and Submillimeter Detectors for Astronomy II, (8 October 2004); doi: 10.1117/12.550401
Show Author Affiliations
William Parkes, Univ. of Edinburgh (United Kingdom)
Alan M. Gundlach, Univ. of Edinburgh (United Kingdom)
Camelia C. Dunare, Univ. of Edinburgh (United Kingdom)
Jon G. Terry, Univ. of Edinburgh (United Kingdom)
J. Tom M. Stevenson, Univ. of Edinburgh (United Kingdom)
Anthony J. Walton, Univ. of Edinburgh (United Kingdom)
Eric Schulte, Raytheon Vision Systems (United States)


Published in SPIE Proceedings Vol. 5498:
Millimeter and Submillimeter Detectors for Astronomy II
Jonas Zmuidzinas; Wayne S. Holland; Stafford Withington, Editor(s)

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