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Proceedings Paper

Fabrication and characterization of phonon-cooled hot-electron bolometers on freestanding 2-µm silicon nitride membranes for THz applications
Author(s): Pedro Pablo Munoz; Sven Bedorf; Michael Brandt; Thomas Tils; Netty Honingh; Karl Jacobs
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Paper Abstract

Superconducting phonon-cooled hot-electron bolometer (HEB) mixers are promising heterodyne detectors for THz frequencies. KOSMA is working to develop a heterodyne receiver for the GREAT receiver on SOFIA for observation at 1.7-1.9 THz using waveguide mixers. Waveguide mixers at these frequencies require very thin device substrates. We report on recent progress in fabricating and characterizing mixers on 2μm thick silicon nitride membranes which are suspended in a substrate channel. Heterodyne measurements with receiver noise temperatures of 1000K at 800GHz RF and 1GHz IF, at a 4.2K bath temperature show that fabrication of phonon-cooled HEBs on membranes is possible with a good noise performance. The HEB device was fabricated at KOSMA and consists of a 3-5nm thin NbTiN film on an AlN buffer layer.

Paper Details

Date Published: 8 October 2004
PDF: 8 pages
Proc. SPIE 5498, Millimeter and Submillimeter Detectors for Astronomy II, (8 October 2004); doi: 10.1117/12.550104
Show Author Affiliations
Pedro Pablo Munoz, Univ. zu Koln (Germany)
Sven Bedorf, Univ. zu Koln (Germany)
Michael Brandt, Univ. zu Koln (Germany)
Thomas Tils, Univ. zu Koln (Germany)
Netty Honingh, Univ. zu Koln (Germany)
Karl Jacobs, Univ. zu Koln (Germany)

Published in SPIE Proceedings Vol. 5498:
Millimeter and Submillimeter Detectors for Astronomy II
Jonas Zmuidzinas; Wayne S. Holland; Stafford Withington, Editor(s)

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