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Proceedings Paper

MEMS application to characterization of field emitters and biomolecules
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Paper Abstract

This paper deals with the latest development of micromachining technology to fabricated nanoscopic structures and applications to nano- and bio- technologies. We have realized well-defined nano structures by using the combination of conventional photo-lithography, LOCOS, and wet anisotropic etching of silicon. The technology has been applied to develop micromachined field emitters that operated in the TEM (transmission electoron microscope) chamber, and the degradation process of the silicon tips was in-situ observed. In addition to this nanoelectromechanical research topics, we have recently expanded our research field into bio- and molecular engineering: silicon nanofabricated twin probes were used to directly manipulate DNA molecules, for instance. Futhermore, bio-molecular linear motors were tested as a mechanical power source for mechanically transferring micro/nano particles.

Paper Details

Date Published: 16 August 2004
PDF: 7 pages
Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); doi: 10.1117/12.548984
Show Author Affiliations
Kuniyuki Kakushima, CIRMMS/IIS, Univ. of Tokyo (Japan)
Hiroyuki Fujita, CIRMMS/IIS, Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 5455:
MEMS, MOEMS, and Micromachining
Hakan Urey; Ayman El-Fatatry, Editor(s)

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