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Proceedings Paper

Polymer-based pixel matrix display in MOEMS technology
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Paper Abstract

The proposed pixel matrix display consists of two plastic elements: a planar waveguide which plays the role of a light reservoir and a deformable thin membrane with a matrix of pillars. On the bottom side of the membrane that touches the light reservoir there is an electrode surrounding all pillars and leaving tops of pillars transparent. The light reservoir has a matrix of individual electrical contacts so that the display can be addressed pixel by pixel and switched on by applying a voltage to the electrical contacts on the light reservoir and the membrane electrode. The electrostatic force locally deforms the membrane and puts the pillars in contact with the light reservoir, therefore, coupling light into the membrane. A demonstrator of a polymer-based pixel matrix display is fabricated in MOEMS technology. The proof-of-principle experiment is made on a 20x20 pixel matrix with an active display matrix area of 5x5 mm2, a light emitting diode illumination and 80 V applied to address pixels.

Paper Details

Date Published: 16 August 2004
PDF: 8 pages
Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); doi: 10.1117/12.548753
Show Author Affiliations
Ryszard R. Buczynski, Warsaw Univ. (Poland)
Stefan Kufner, Institut fur Mikrotechnik Mainz GmbH (Germany)
Rafal Kasztelanic, Warsaw Univ. (Poland)
Institut fur Mikrotechnik Mainz GmbH (Germany)
Arkadiusz Sagan, Warsaw Univ. (Poland)
Ines Frese, Institut fur Mikrotechnik Mainz GmbH (Germany)
Thomas Klotzbucher, Institut fur Mikrotechnik Mainz GmbH (Germany)
Tomasz Szoplik, Warsaw Univ. (Poland)

Published in SPIE Proceedings Vol. 5455:
MEMS, MOEMS, and Micromachining
Hakan Urey; Ayman El-Fatatry, Editor(s)

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