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Proceedings Paper

Development of RF MEMS phase shifters using polymer and ferroelectric thin film
Author(s): Taeksoo Ji; Hargsoon Yoon; K. A. Jose; Vijay K. Varadan
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Paper Abstract

High performance of RF MEMS phase shifters using polymer bridges and ferroelectric thin film has been demonstrated in this research. To reduce the operating voltage for the RF MEMS phase shifters, polymer bridges and ferroelectric thin film have been implemented. The phase shifter fabricated on a quartz substrate is capable of continuous change in phase up to about 90o (at 15 GHz) with a maximum actuation voltage of 20V. Using polymer as the bridge materials contributes to the reduction in actuation voltage due to their low Young's modulus.

Paper Details

Date Published: 29 July 2004
PDF: 7 pages
Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); doi: 10.1117/12.548433
Show Author Affiliations
Taeksoo Ji, The Pennsylvania State Univ. (United States)
Hargsoon Yoon, The Pennsylvania State Univ. (United States)
K. A. Jose, The Pennsylvania State Univ. (United States)
Vijay K. Varadan, The Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 5389:
Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

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