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Proceedings Paper

Theoretical modeling of the operational mechanism of a photoconductive MEMS spatial light modulator under AC and DC bias
Author(s): Jed Khoury; Charles L. Woods; B. Haji-Saeed; S. K. Sengupta; Dalila B. Megherbi; W. D. Goodhue; John Kierstead
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Paper Abstract

This paper analyzes the operation of a new optically addressed deformable mirror device for applications in adaptive optics and optical signal processing. Device operation utilizes a pixellated metallized polymeric membrane mirror supported above an optically addressed photoconductive substrate. A grid of patterned photoresist supports the metallized membrane. A conductive ZnO layer is placed on the backside of the substrate. The device operates as an impedance distribution between two cascaded impedances between the deformable membrane and substrate and the substrate and back electrode. We develop a theoretical model to analyze the deformation as a function of the light intensity and electrical drive

Paper Details

Date Published: 12 April 2004
PDF: 5 pages
Proc. SPIE 5437, Optical Pattern Recognition XV, (12 April 2004); doi: 10.1117/12.548074
Show Author Affiliations
Jed Khoury, Air Force Research Lab. (United States)
Charles L. Woods, Air Force Research Lab. (United States)
B. Haji-Saeed, Univ. of Massachusetts/Lowell (United States)
S. K. Sengupta, Univ. of Massachusetts/Lowell (United States)
Dalila B. Megherbi, Univ. of Massachusetts/Lowell (United States)
W. D. Goodhue, Univ. of Massachusetts/Lowell (United States)
John Kierstead, Solid State Scientific Corp. (United States)

Published in SPIE Proceedings Vol. 5437:
Optical Pattern Recognition XV
David P. Casasent; Tien-Hsin Chao, Editor(s)

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