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Proceedings Paper

Fast measurements with a slow detector: photoacoustic investigations of 'steam' laser cleaning
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Paper Abstract

The dynamics of explosive boiling of a 2-propanol layer of variable thickness on a Si substrate heated by a nanosecond KrF excimer laser was studied using a contact photoacoustic technique. The transition from acoustic generation at a free Si boundary to that at a rigid alcohol/Si boundary accompanied by a sharp increase of acoustic generation efficiency was found above a laser fluence threshold of 0.17 J/cm2 and a liquid layer thickness greater than 0.25 μm due to subnanosecond near-critical explosive boiling of the superheated liquid layer near the hot absorbing Si substrate. The gradual increase of the photoacoustic response of the superheated alcohol with increasing thickness of the liquid film at fluences above the explosive boiling threshold was attributed to the fluence- and time-dependent increase of the area undergoing explosive boiling.

Paper Details

Date Published: 15 July 2004
PDF: 8 pages
Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); doi: 10.1117/12.547980
Show Author Affiliations
Sergei I. Kudryashov, Arkansas State Univ. (United States)
Susan D. Allen, Arkansas State Univ. (United States)
Shishir Shukla, Arkansas State Univ. (United States)
Univ. of Memphis (United States)


Published in SPIE Proceedings Vol. 5339:
Photon Processing in Microelectronics and Photonics III
Jan J. Dubowski; Peter R. Herman; Friedrich G. Bachmann; Willem Hoving; Jim Fieret; David B. Geohegan; Frank Träger; Kunihiko Washio; Alberto Pique; Xianfan Xu; Tatsuo Okada, Editor(s)

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