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Proceedings Paper

Analysis of static and dynamic operational behavior of active micromembranes
Author(s): Petra Aswendt; Thierry Dean
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Paper Abstract

The paper describes methodology, instrumentation, and experiments for the study of the mechanical behavior of MEMS, especially active micromembranes. The technique of speckle interferometry is extended to high microscopic magnification and short wavelength of laser light and two corresponding interferometric solutions are discussed. Challenging issues for the optical measurement are the micrometer lateral size of the details, the nanometer deflection, and the Megahertz frequencies of resonant vibrations. Micromembrane arrays different in size and shape were analysed with respect to piezo response, resonance, and cross-talk. Systematic investigations revealed the complex micromechanical behavior of the microstructures.

Paper Details

Date Published: 17 August 2004
PDF: 9 pages
Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.547720
Show Author Affiliations
Petra Aswendt, Fraunhofer-Institut fur Werkzeugmaschinen und Umformtechnik (Germany)
Thierry Dean, Thales Research and Technology (France)


Published in SPIE Proceedings Vol. 5458:
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki; Anand K. Asundi, Editor(s)

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