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Proceedings Paper

Basic aspects of deep lithography with particles for the fabrication of micro-optical and micromechanical structures
Author(s): Bart Volckaerts; Pedro Vynck; Michael Vervaeke; Luigi Cosentino; Paolo Finocchiaro; Patrick Reichart; Gerd Datzmann; Andreas Hauptner; Gunther Dollinger; Alex Hermanne; Hugo Thienpont
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Paper Abstract

The strength of today's deep lithographic micro-machining technologies is their ability to fabricate monolithic building-blocks including optical and mechanical functionalities that can be precisely integrated in more complex photonic systems. In this contribution we present the physical aspects of Deep Lithography with ion Particles (DLP). We investigate the impact of the ion mass, energy and fluence on the developed surface profile to find the optimized irradiation conditions for different types of high aspect ratio micro-optical structures. To this aim, we develop a software program that combines the atomic interaction effects with the macroscopic beam specifications. We illustrate the correctness of our simulations with experimental data that we obtained in a collaboration established between the accelerator facilities at TUM, LNS and VUB. Finally, we review our findings and discuss the strengths and weaknesses of DLP with respect to Deep Lithography with X-rays (LIGA).

Paper Details

Date Published: 8 September 2004
PDF: 12 pages
Proc. SPIE 5454, Micro-Optics: Fabrication, Packaging, and Integration, (8 September 2004); doi: 10.1117/12.547718
Show Author Affiliations
Bart Volckaerts, Vrije Univ. Brussel (Belgium)
Pedro Vynck, Vrije Univ. Brussel (Belgium)
Michael Vervaeke, Vrije Univ. Brussel (Belgium)
Luigi Cosentino, INFN (Italy)
Paolo Finocchiaro, INFN (Italy)
Patrick Reichart, Technische Univ. Munchen (Germany)
Gerd Datzmann, Technische Univ. Munchen (Germany)
Andreas Hauptner, Technische Univ. Munchen (Germany)
Gunther Dollinger, Technische Univ. Munchen (Germany)
Alex Hermanne, Vrije Univ. Brussel (Belgium)
Hugo Thienpont, Vrije Univ. Brussel (Belgium)

Published in SPIE Proceedings Vol. 5454:
Micro-Optics: Fabrication, Packaging, and Integration
Peter Van Daele; Juergen Mohr, Editor(s)

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