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Proceedings Paper

Computerization of contact white light interferometers for linear measurements with submicrometer resolution
Author(s): Vladimir I. Teleshevsky; A. V. Bogomolov; V. N. Galkin
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Paper Abstract

The development of the computerized contact white light interferometer is considered. The interferometer is designed for calibration of the standard reference end gauges and other objects in linear range 0,1-100 mm with resolution 0,01 mkm. The salient features of digital processing of the interference images are presented, including architecture of frame grabber and corresponding software. The computerization is in full agreement with the standardized procedures of calibration, increases the accuracy and productivity of measurement, extends their functional opportunities.

Paper Details

Date Published: 19 February 2004
PDF: 6 pages
Proc. SPIE 5381, Lasers for Measurements and Information Transfer 2003, (19 February 2004); doi: 10.1117/12.547702
Show Author Affiliations
Vladimir I. Teleshevsky, Moscow State Univ. of Technology Stankin (Russia)
A. V. Bogomolov, Moscow State Univ. of Technology Stankin (Russia)
V. N. Galkin, Moscow State Univ. of Technology Stankin (Russia)


Published in SPIE Proceedings Vol. 5381:
Lasers for Measurements and Information Transfer 2003

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