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Proceedings Paper

Analysis of parametric resonances in comb-driven microscanners
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Paper Abstract

Dynamic behavior of a comb-driven torsional microscanner is governed by a nonlinear parametric differential equation. Theoretically, such systems have multiple resonances located near the integer fractions of twice the mechanical resonance frequency. The number of observable parametric resonances strongly depends on the damping of the system, whereas the stable and unstable operating regions are determined by drive-voltage and drive-frequency. In atmospheric pressure, only first few of these parametric resonances are observable within the operation voltage range of the devices. This paper explores the effect of damping on the various characteristics of parametric resonances and some unusual scanner behavior rarely seen in mechanical structures. A numerical and an analytical model for comb-driven microscanners are presented. Frequency responses of various devices are experimentally measured inside a vacuum chamber at different ambient pressures ranging from atmospheric pressure to 30 mTorr. Experimental results are compared with analytical and simulation results.

Paper Details

Date Published: 16 August 2004
PDF: 9 pages
Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); doi: 10.1117/12.547444
Show Author Affiliations
Caglar Ataman, Koc Univ. (Turkey)
Ozgur Kaya, Koc Univ. (Turkey)
Hakan Urey, Koc Univ. (Turkey)

Published in SPIE Proceedings Vol. 5455:
MEMS, MOEMS, and Micromachining
Hakan Urey; Ayman El-Fatatry, Editor(s)

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