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Proceedings Paper

Electrostatic operation and curvature modeling for a MEMS flexible film actuator
Author(s): B. Edmonds; J. Ernstberger; K. Ghosh; J. Malaugh; D. Nfodjo; W. Samyono; X. Xu; David Edward Dausch; Scott Goodwin; Ralph C. Smith
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Paper Abstract

In this paper we develop a mathematical model to simulate the actuation of a multilayer metallic strip. In the first step of the model development, we employ previous theory to quantify the radius of curvature in the unimorph due to differing thermal coefficients in the constituent materials. The resulting radius of curvature is subsequently used to compute the voltage required to uncurl the actuator. Numerical experiments were performed with the model and the trends were found to be in agreement with experimental data.

Paper Details

Date Published: 26 July 2004
PDF: 10 pages
Proc. SPIE 5383, Smart Structures and Materials 2004: Modeling, Signal Processing, and Control, (26 July 2004); doi: 10.1117/12.547389
Show Author Affiliations
B. Edmonds, Virginia Commonwealth Univ. (United States)
J. Ernstberger, North Carolina State Univ. (United States)
K. Ghosh, Univ. of Wisconsin/Milwaukee (United States)
J. Malaugh, Univ. of Alabama/Birmingham (United States)
D. Nfodjo, Univ. of Louisville (United States)
W. Samyono, Old Dominion Univ. (United States)
X. Xu, Florida State Univ. (United States)
David Edward Dausch, MCNC Research and Development Institute (United States)
Scott Goodwin, MCNC Research and Development Institute (United States)
Ralph C. Smith, North Carolina State Univ. (United States)


Published in SPIE Proceedings Vol. 5383:
Smart Structures and Materials 2004: Modeling, Signal Processing, and Control
Ralph C. Smith, Editor(s)

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