Share Email Print
cover

Proceedings Paper

Gas-deposited WO3 nanoparticles studied by scanning force microscopy
Author(s): Judit Kopniczky; Anders Hoel; A. Mechler; Peter Heszler; Claes-Goran Granqvist
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

WO3 nanoparticles were generated by gas deposition. Deposits on Al substrates were studied by scanning force microscopy operated in the intermittent-contact (tapping) mode. At low surface coverage (< 0.5 %), we observed single nanoparticles with a mean size of ~ 1.5 nm. An increase of the amount of particles led to agglomerates, which appeared at surface coverages as low as 2 to 4 %. At full coverage the mean agglomerate size was ~ 5 nm. This value did not change as the sample was annealed at temperatures up to 250 °C. The size distribution of the agglomerates was found to be log-normal, i.e., similar to the size distribution of the gas-phase nanoparticles forming the deposit. For explaining the obtained log-normal size distribution of the agglomerates simulations of the agglomeration process were also carried out.

Paper Details

Date Published: 25 May 2004
PDF: 8 pages
Proc. SPIE 5472, Noise and Information in Nanoelectronics, Sensors, and Standards II, (25 May 2004); doi: 10.1117/12.547356
Show Author Affiliations
Judit Kopniczky, Uppsala Univ. (Sweden)
Anders Hoel, Uppsala Univ. (Sweden)
A. Mechler, Univ. of California/Santa Barbara (United States)
Peter Heszler, Uppsala Univ. (Sweden)
Hungarian Academy of Sciences (Hungary)
Claes-Goran Granqvist, Uppsala Univ. (Sweden)


Published in SPIE Proceedings Vol. 5472:
Noise and Information in Nanoelectronics, Sensors, and Standards II
Janusz M. Smulko; Yaroslav Blanter; Mark I. Dykman; Laszlo B. Kish, Editor(s)

© SPIE. Terms of Use
Back to Top