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Proceedings Paper

Highly sensitive and selective WO3 nanoparticle gas sensor operating in thermally modulated dynamic mode
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Paper Abstract

Nanoparticle films of crystalline WO3, designed for gas sensing applications, were deposited on alumina substrates by reactive gas deposition. H2S, ethanol vapour, and binary mixtures of ethanol/H2S, ethanol/NO2 and H2S/NO2 were used in different concentrations for testing the performance of the sensor device. The sensor was operated in dynamic mode by modulating its temperature between 150 and 250 °C. Coefficients were extracted by applying Fast Fourier Transform (FFT) and Discrete Wavelet Transform (DWT) methods to the dynamic resistance response of the sensor. These coefficients were then used as inputs for pattern recognition methods to extract both quantitative (concentration) and qualitative (chemical selectivity) information about the test gases. After sensor calibration, it was possible to detect as little as 200 ppb of ethanol and 20 ppb of H2S with good accuracy. Furthermore, ethanol and H2S could be detected with good sensitivity and selectivity in the presence of both reducing and oxidising gases.

Paper Details

Date Published: 25 May 2004
PDF: 12 pages
Proc. SPIE 5472, Noise and Information in Nanoelectronics, Sensors, and Standards II, (25 May 2004); doi: 10.1117/12.547235
Show Author Affiliations
Radu Ionescu, Uppsala Univ. (Sweden)
Univ. Rovira i Virgili (Spain)
Anders Hoel, Uppsala Univ. (Sweden)
Claes-Goran Granqvist, Uppsala Univ. (Sweden)
Eduard Llobet, Univ. Rovira i Virgili (Spain)
Peter Heszler, Uppsala Univ. (Sweden)
Univ. of Szeged (Hungary)


Published in SPIE Proceedings Vol. 5472:
Noise and Information in Nanoelectronics, Sensors, and Standards II
Janusz M. Smulko; Yaroslav Blanter; Mark I. Dykman; Laszlo B. Kish, Editor(s)

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