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Proceedings Paper

Fabrication of optical waveguides using laser direct writing method
Author(s): Sung H. Cho; Jung Min Kim; Jae G. Kim; Won S. Chang; Eung S. Lee
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Paper Abstract

Laser direct writing (LDW) process is developed using 3-rd harmonic Diode Pumped Solid State Laser (DPSSL) with the near UV wavelength of 355 nm. Photo-sensitive curable polymer is irradiated by UV laser and developed using polymer solvent to obtain quasi-3D patterns. We performed basic experiments for the various process conditions such as laser power, writing speed, laser focus, and optical polymer property to get the optimal conditions. This process could be applied to fabricate a single-mode waveguide without expensive mask projection method. Experimentally, the patterns of trapezoidal shape were manufactured into dimension of 8.4μm width and 7.5μm height. Propagation loss of planar waveguide was 1.42 dB/cm at wavelength of 1,550 nm.

Paper Details

Date Published: 20 September 2004
PDF: 7 pages
Proc. SPIE 5448, High-Power Laser Ablation V, (20 September 2004); doi: 10.1117/12.546816
Show Author Affiliations
Sung H. Cho, Korea Institute of Machinery and Materials (South Korea)
Jung Min Kim, Korea Institute of Machinery and Materials (South Korea)
Jae G. Kim, Korea Institute of Machinery and Materials (South Korea)
Won S. Chang, Korea Institute of Machinery and Materials (South Korea)
Eung S. Lee, Korea Institute of Machinery and Materials (South Korea)


Published in SPIE Proceedings Vol. 5448:
High-Power Laser Ablation V
Claude R. Phipps, Editor(s)

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