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Proceedings Paper

Design aspects in the development of a standing wave interferometer
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Paper Abstract

A novel interferometer based on sampling the maxima and minima of intensity of an optical standing wave has been developed. The photoelectric detection of the standing wave is performed by using a partially transparent thin-film photodiode. The automatic bidirectional fringe counting is provided by a partially transparent and phase-sensitive detector which is realized by the integration of two stacked transparent photodiodes along the optical axis of the standing wave. To obtain the ideal sine and cosine signals, the transparent phase-sensitive detector has to be optimized by adjusting the thickness of the single layers. Some features of optimization will be presented and explained. Length measurements have been demonstrated by displacing the plane mirror and bidirectional fringe counting within the standing wave.

Paper Details

Date Published: 10 September 2004
PDF: 9 pages
Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); doi: 10.1117/12.546708
Show Author Affiliations
Viktor Mandryka, Technische Univ. Ilmenau (Germany)
Hans Buchner, Technische Univ. Ilmenau (Germany)
Gerd Jager, Technische Univ. Ilmenau (Germany)


Published in SPIE Proceedings Vol. 5457:
Optical Metrology in Production Engineering
Wolfgang Osten; Mitsuo Takeda, Editor(s)

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