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Proceedings Paper

Capabilities and limitations of micro-opto-electro-mechnical (MOEM) accelerometers: an analysis
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Paper Abstract

Micro-Opto-Electro-Mechanical (MOEM) accelerometers employing a cantilever beam and anti resonant reflecting optical waveguide (ARROW) on a silicon is analyzed. Two types of MOEM accelerometers and a closed loop operation that can enhance the performance significantly compared to MEMS accelerometer is presented. As a typical example our study shows a MOEM accelerometer with a minimum detectable acceleration of 0.255 μ g/√Hz, a dynamic range of 160g, scale factor stability of 1.57 ppm/°c and shock survivability of more than 1000 g.

Paper Details

Date Published: 29 July 2004
PDF: 12 pages
Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); doi: 10.1117/12.546460
Show Author Affiliations
Ananth Selvarajan, Indian Institute of Science (India)
Jagannath Nayak, Research Ctr. Imarat (India)
Talabuttala Srinivas, Indian Institute of Science (India)
D. V. K. Sastry, Research Ctr. Imarat (India)


Published in SPIE Proceedings Vol. 5389:
Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

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