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Proceedings Paper

Design, testing, and calibration of an integrated Mach-Zehnder-based optical read-out architecture for MEMS characterization
Author(s): Andrei Sabac; Christophe Gorecki; Michal Jozwik; Thierry Dean; Alain Jacobelli
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Paper Abstract

While testing electrical properties in microsystems is a well-developed art, the testing of mechanical properties of MEMS devices is not. There is a great need for techniques that will allow the evaluation of MEMS devices, in all stages of manufacturing, with respect to material and micromechanical properties. In this contribution we propose a new approach, based on the integrated optical read-out using a Mach-Zehnder interferometer (MZI), monolithically integrated with the piezoelectric (PZT) actuated membrane.

Paper Details

Date Published: 17 August 2004
PDF: 6 pages
Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.546299
Show Author Affiliations
Andrei Sabac, FEMTO-ST, CNRS (France)
Univ. de Franche-Comté (France)
Christophe Gorecki, FEMTO-ST, CNRS (France)
Univ. de Franche-Comté (France)
Michal Jozwik, FEMTO-ST, CNRS (France)
Univ. de Franche-Comté (France)
Thierry Dean, Thales Research & Technology (France)
Alain Jacobelli, Thales Research & Technology (France)


Published in SPIE Proceedings Vol. 5458:
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki; Anand K. Asundi, Editor(s)

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