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Proceedings Paper

Optical characterization of micro-electro-mechanical structures
Author(s): Valerio Annovazzi-Lodi; Mauro Benedetti; Sabina Merlo; Michele Norgia; Benedetto Vigna; Simone Sassolini
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Paper Abstract

In this paper, semiconductor laser feedback interferometry is applied to the characterization of vibrating mass microsensors, such as gyroscopes and accelerometers. Complete characterization of such devices with this technique includes the identification of the vibration modes and the measurement of the resonance curves of the different axes, the determination of resonance frequency, quality factor and the actuation efficiency as functions of different parameters such as pressure. In the case of a gyroscope, tuning of the driving and of the sensing axes can be also performed, as well as the measurement of the Coriolis force. Thanks to its very simple optical implementation, feedback interferometry provides a viable alternative to the standard electrical measurements, and is especially useful for the characterization of prototypes, for which a dedicated electronics circuit is not yet available.

Paper Details

Date Published: 17 August 2004
PDF: 12 pages
Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.546283
Show Author Affiliations
Valerio Annovazzi-Lodi, Univ. degli Studi di Pavia (Italy)
Mauro Benedetti, Univ. degli Studi di Pavia (Italy)
Sabina Merlo, Univ. degli Studi di Pavia (Italy)
Michele Norgia, Univ. degli Studi di Pavia (Italy)
Benedetto Vigna, STMicroelectronics (Italy)
Simone Sassolini, STMicroelectronics (Italy)

Published in SPIE Proceedings Vol. 5458:
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki; Anand K. Asundi, Editor(s)

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