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Proceedings Paper

Signal modeling for modern interference microscopes
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Paper Abstract

A theoretical model of the optical system of an interference microscope includes both geometrical and spectral contributions to fringe contrast localization. An incoherent superposition of interference patterns over a range of wavelengths and pupil-plane coordinates predicts the frequency-domain portrait of the interference phenomenon. An inverse Fourier transform then provides simulated signals that correlate very closely to experimental data. The model is particularly useful for signal prediction, algorithm testing, uncertainty analysis and system characterization, including modern applications in thin film analysis and stroboscopic interferometry.

Paper Details

Date Published: 10 September 2004
PDF: 9 pages
Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); doi: 10.1117/12.546226
Show Author Affiliations
Peter J. de Groot, Zygo Corp. (United States)
Xavier Colonna de Lega, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 5457:
Optical Metrology in Production Engineering
Wolfgang Osten; Mitsuo Takeda, Editor(s)

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