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Proceedings Paper

Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy
Author(s): David Grigg; Eric Felkel; John Roth; Xavier Colonna de Lega; Leslie Deck; Peter J. de Groot
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Paper Abstract

We report on characterization techniques for microstructures using white-light interference microscopy. Capabilities include surface profilometry, integrated profilometry and lateral metrology for full 3D characterization, defect detection, profilometry of thin film structures, stroboscopic interferometry of vibrating samples, and real-time profile snapshots of moving MEMS devices.

Paper Details

Date Published: 16 August 2004
PDF: 7 pages
Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); doi: 10.1117/12.546211
Show Author Affiliations
David Grigg, Zygo Corp. (United States)
Eric Felkel, Zygo Corp. (United States)
John Roth, Zygo Corp. (United States)
Xavier Colonna de Lega, Zygo Corp. (United States)
Leslie Deck, Zygo Corp. (United States)
Peter J. de Groot, Zygo Corp. (United States)


Published in SPIE Proceedings Vol. 5455:
MEMS, MOEMS, and Micromachining
Hakan Urey; Ayman El-Fatatry, Editor(s)

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