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Proceedings Paper

Miniaturised optical displacement sensor
Author(s): Frank Gindele; Frank Gaul; Silvio Kraus; Susanne Sigloch; Ulrich Teubner
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Paper Abstract

The primary object presented in this contribution is the miniaturization of a displacement sensor system with the potential for high accuracy measurements and for cost-effective production in polymers. The measurement of linear displacements can be performed by different methods e.g. magnetoresistive, potentiometric, electromagnetic or inductive encoder systems. For movements in the millimeter range and above the most precise systems are based on optical methods. The displacement measurement of our sensor system uses the intensity modulation of two amplitude gratings, moving relative to each other and illuminated by a LED. To increase the system resolution and the signal quality the grating/detector combination is divided into four areas which are phase shifted to each other. The grating period is 25 μm with a geometrical accuracy below 1 μm. The amplitude gratings have been processed on a glass substrate lithographically. Applying electro-discharge machining a miniaturised optical bench for the passive alignment of the optical and the opto-electronic components has been realised. The sensor has an overall size of 6x4x3 mm3 and is designed for the future replication in one single polymer part. In combination with an electronic interpolation the sensor will be capable for a sub-micrometer accuracy.

Paper Details

Date Published: 1 September 2004
PDF: 5 pages
Proc. SPIE 5459, Optical Sensing, (1 September 2004); doi: 10.1117/12.546077
Show Author Affiliations
Frank Gindele, Institut fur Mikrotechnik Mainz GmbH (Germany)
Frank Gaul, Institut fur Mikrotechnik Mainz GmbH (Germany)
Silvio Kraus, Institut fur Mikrotechnik Mainz GmbH (Germany)
Susanne Sigloch, Institut fur Mikrotechnik Mainz GmbH (Germany)
Ulrich Teubner, Institut fur Mikrotechnik Mainz GmbH (Germany)


Published in SPIE Proceedings Vol. 5459:
Optical Sensing
Brian Culshaw; Anna Grazia Mignani; Rainer Riesenberg, Editor(s)

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