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Proceedings Paper

Novel design and prototyping of a micro-optical distance sensor considering a distributed fabrication
Author(s): Uwe Hollenbach; Juergen Mohr; Toru Oka; Ulrike Wallrabe; Ingo Sieber
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Paper Abstract

A novel design for a compact and robust micro optical distance sensor is presented. It is suitable for mass fabrication by micro molding known form the LIGA technique [1] and automatic assembly. Due to a modular design approach a distributed fabrication of the device modules is currently implemented. This allows a separate fabrication of the modules at several manufacturers each one being an expert for the special technology needed to fabricate the module. During the design phase not only the optical specification of the sensor system but also all requirements given by the manufacturers, such as easy manufacturability with high throughput as well as defined interfaces need to be considered.

Paper Details

Date Published: 1 September 2004
PDF: 8 pages
Proc. SPIE 5459, Optical Sensing, (1 September 2004); doi: 10.1117/12.546023
Show Author Affiliations
Uwe Hollenbach, Forschungszentrum Karlsruhe GmbH (Germany)
Juergen Mohr, Forschungszentrum Karlsruhe GmbH (Germany)
Toru Oka, Mitsubishi Electric Corp. (Japan)
Ulrike Wallrabe, Forschungszentrum Karlsruhe GmbH (Germany)
Ingo Sieber, Forschungszentrum Karlsruhe GmbH (Germany)


Published in SPIE Proceedings Vol. 5459:
Optical Sensing
Brian Culshaw; Anna Grazia Mignani; Rainer Riesenberg, Editor(s)

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