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Proceedings Paper

Digital holographic microscope for thermal characterization of silicon microhotplates for gas sensor
Author(s): Giuseppe Coppola; Sergio De Nicola; Pietro Ferraro; Andrea Finizio; Piera Maccagnani; Giovanni Pierattini
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Paper Abstract

Digital Holographic Microscope has been employed to obtain an accurate characterization of a micro-hotplate for gas sensing applications. The fabrication of these sensors needs different materials, with different properties and different technological processes, which involve high temperature treatments. Consequently, the structure is affected by the presence of residual stresses, appearing in form of undesired bowing of the membrane. Moreover, when the temperature of the sensor increases, a further warpage of the structure is observed. DHM allows to evaluate, with high accuracy, deformations due to the residual stress and how these deformations are affected by thermal loads. In particular, profiles of the structure have been evaluated both in quasi-static condition and the profile variation due to the biasing of the heater resistor has been measured.

Paper Details

Date Published: 17 August 2004
PDF: 8 pages
Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.546016
Show Author Affiliations
Giuseppe Coppola, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Sergio De Nicola, Istituto di Cibernetica, CNR (Italy)
Pietro Ferraro, Istituto Nazionale di Ottica Applicata (Italy)
Andrea Finizio, Istituto di Cibernetica, CNR (Italy)
Piera Maccagnani, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Giovanni Pierattini, Istituto di Cibernetica, CNR (Italy)


Published in SPIE Proceedings Vol. 5458:
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki; Anand K. Asundi, Editor(s)

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