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Proceedings Paper

Digital holographic microscopy applied to metrology
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Paper Abstract

We report on a method called Digital Holographic Microscopy (DHM) for the numerical reconstruction of digital holograms taken with a microscope. It allows for simultaneous amplitude and quantitative phase contrast imaging. The reconstruction method computes the propagation of the complex optical wavefront diffracted by the object and is used to determine the refractive index and/or shape of the object with an accuracy in the nanometer range along the optical axis. A single hologram is needed for reconstruction. The method requires the adjustment of several reconstruction parameters. The adjustment is performed automatically by using a suitable algorithm. The method has been applied to the measurement of several integrated optics devices, MOEMS, and integrated micro-optical components: microlenses.

Paper Details

Date Published: 10 September 2004
PDF: 9 pages
Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); doi: 10.1117/12.546014
Show Author Affiliations
Christian D. Depeursinge, Ecole Polytechnique Federale de Lausanne (Switzerland)
Florian Charriere, Ecole Polytechnique Federale de Lausanne (Switzerland)
Anca M. Marian, Ecole Polytechnique Federale de Lausanne (Switzerland)
Frederic Montfort, Ecole Polytechnique Federale de Lausanne (Switzerland)
Tristan Colomb, Ecole Polytechnique Federale de Lausanne (Switzerland)
Jonas Kuhn, Ecole Polytechnique Federale de Lausanne (Switzerland)
Etienne Cuche, Lyncee Tec SA (Switzerland)
Yves Emery, Lyncee Tec SA (Switzerland)
Pierre Marquet, Univ. de Lausanne (Switzerland)
Pierre J. Magistretti, Univ. de Lausanne (Switzerland)

Published in SPIE Proceedings Vol. 5457:
Optical Metrology in Production Engineering
Wolfgang Osten; Mitsuo Takeda, Editor(s)

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