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Proceedings Paper

A miniaturized SNOM sensor based on the optical feedback inside the VCSEL cavity
Author(s): Christophe Gorecki; Dominique Heinis
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Paper Abstract

We propose and demonstrate an original concept of a near-field sensor using the optical feedback properties of a vertical cavity surface-emitting laser as an active principle of detection. This is based on the monitoring perturbations induced in the laser cavity by the backscattered light coming from the specimen. Test images confirm the efficiency of proposed SNOM microscope and a solution for the integration of proposed architecture is given.

Paper Details

Date Published: 17 August 2004
PDF: 5 pages
Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.546003
Show Author Affiliations
Christophe Gorecki, FEMTO-ST, CNRS (France)
Univ. de Franche-Comte (France)
Dominique Heinis, FEMTO-ST, CNRS (France)
Univ. de Franche-Comte (France)


Published in SPIE Proceedings Vol. 5458:
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki; Anand K. Asundi, Editor(s)

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