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Proceedings Paper

Evolutionary approach to an inverse problem in near-field optics microscopy
Author(s): Demetrio Macias; Dominique Barchiesi; Alexandre Vial
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Paper Abstract

In the present work we employ an heuristic method based on evolutionary algorithms for the solution of an inverse problem in near-field optics. The input for the inversion procedure are some of the experimental data that appear in reference 1. In addition, we make use of the direct model proposed in that reference for the iterative solution of the direct problem. This requirement is directly related to the nature of the evolutionary approach employed. We show the possibility to recover, with a high degree of confidence, some parameters of the sample that originated the experimental information. The usefulness of the inverse method is therefore obvious if the recorded data have to be used for metrologic purpose.

Paper Details

Date Published: 17 August 2004
PDF: 8 pages
Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.545793
Show Author Affiliations
Demetrio Macias, Univ. de Technologie de Troyes (France)
Dominique Barchiesi, Univ. de Technologie de Troyes (France)
Alexandre Vial, Univ. de Technologie de Troyes (France)


Published in SPIE Proceedings Vol. 5458:
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki; Anand K. Asundi, Editor(s)

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