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Proceedings Paper

N-lambda speckle-interferometry for contouring in industrial applications
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Paper Abstract

In some specific applications the electronic speckle pattern interferometry (ESPI) is superior to other optical surface metrology methods. The two-wavelength ESPI for surface contouring can achieve both high accuracy of height resolution in the micron range and short measurement times far below a second. A further advantage of this method is that compared to e.g. triangulation, illumination axis and observation axis can be identical. A problem of interferometric methods in general are phase ambiguities originating from discontinuous measurement object surfaces. A common idea to decrease the range of ambiguity is the fusion of several interferograms recorded at different wavelengths. This paper presents a concept for a loss free sequential superposition of several spatially separated laser beams as well as algorithms for the determination of measured surface discontinuities. Also a solution of a stability control for fast wavelength tuning of laser diodes is presented.

Paper Details

Date Published: 10 September 2004
PDF: 9 pages
Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); doi: 10.1117/12.545706
Show Author Affiliations
Andreas Purde, Technische Univ. Munchen (Germany)
Andreas Meixner, Technische Univ. Munchen (Germany)
Katharina Bachfischer, Technische Univ. Munchen (Germany)
Thomas Zeh, Technische Univ. Munchen (Germany)
Philipp Kirilenko, St. Petersburg State Polytechnic Univ. (Russia)
Alexander W. Koch, Technische Univ. Munchen (Germany)

Published in SPIE Proceedings Vol. 5457:
Optical Metrology in Production Engineering
Wolfgang Osten; Mitsuo Takeda, Editor(s)

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