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Proceedings Paper

Combined interference and scanning force microscope
Author(s): Hans Ulrich Danzebrink; James W. G. Tyrrell; Claudio Dal Savio; Rolf Kruger-Sehm
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Paper Abstract

A novel compact sensor head combining optical interference and scanning probe microscopy in a single instrument has been developed. The instrument is able to perform complementary quantitative measurements, combining fast non-destructive three-dimensional surface analysis with high lateral resolution imaging. The sensor head has been integrated within the architecture of a commercial interference microscope. The combined instrument makes available both the acquisition software and the hardware interface of the commercial microscope. Furthermore, the use of an optical fiber to transmit light from an external laser removes a major heat source from the measurement environment and its small diameter makes aperture correction unnecessary. Lateral resolution is extended by the attachment of a specially designed scanning probe microscope (SPM) module to the microscope objective. The SPM unit is based upon piezo-resistive cantilever technology and is self-sensing to ensure a compact design that satisfies working distance criteria defined by the optics. A major benefit of the system, in terms of a quantitative nano-metrology, is the possibility to perform a traceable and direct calibration of the SPM module. Ellipsometry has been used to quantify the impact of material differences upon interference height data. Corrected values show excellent agreement with SPM height data.

Paper Details

Date Published: 10 September 2004
PDF: 8 pages
Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); doi: 10.1117/12.545693
Show Author Affiliations
Hans Ulrich Danzebrink, Physikalisch-Technische Bundesanstalt (Germany)
James W. G. Tyrrell, Physikalisch-Technische Bundesanstalt (Germany)
Claudio Dal Savio, Physikalisch-Technische Bundesanstalt (Germany)
Rolf Kruger-Sehm, Physikalisch-Technische Bundesanstalt (Germany)


Published in SPIE Proceedings Vol. 5457:
Optical Metrology in Production Engineering
Wolfgang Osten; Mitsuo Takeda, Editor(s)

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