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Proceedings Paper

Bragg reflector based on periodic structures for silicon MOEMS applications
Author(s): Munizer G. Purica; Elena Budianu; Mihai Kusko; Daniela Dragoman; George Dinescu
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Paper Abstract

We report an analytical model for calculation of reflection and transmission coefficients of a Bragg reflector with periodic structure using transfer matrix method. Using explicit expressions for these coefficients, the reflectivity of the periodic structures for different pairs of layers and layer thickness was simulated. We investigate the reflectivity of the periodic structures consisting of following pairs of successive layers: SiO2 /Si3N4 (low ratio of refractive indexes); poly-Si/ SiO2 (high ratio), Si/air-gap (high contrast). The theoretical and experimental investigations of a particular periodic structure consisting of SiO2/Au are also presented. Our method allows the rapid evaluation of reflectance of Bragg reflector with periodic structure.

Paper Details

Date Published: 16 August 2004
PDF: 8 pages
Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); doi: 10.1117/12.545585
Show Author Affiliations
Munizer G. Purica, National Institute for Research and Development in Microtechnologies (Romania)
Elena Budianu, National Institute for Research and Development in Microtechnologies (Romania)
Mihai Kusko, National Institute for Research and Development in Microtechnologies (Romania)
Daniela Dragoman, Univ. of Bucharest (Romania)
George Dinescu, National Institute for Research and Development in Lasers, Plasma and Radiation Physics (Romania)


Published in SPIE Proceedings Vol. 5455:
MEMS, MOEMS, and Micromachining
Hakan Urey; Ayman El-Fatatry, Editor(s)

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