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Proceedings Paper

Interferometric methods for static and dynamic characterizations of micromembranes for sensing functions
Author(s): Leszek Salbut; Jacek Kacperski; Adam R. Styk; Michal Jozwik; Christophe Gorecki; Hakan Urey; Alain Jacobelli; Thierry Dean
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Paper Abstract

We present a methodology for static and dynamic testing of mechanical properties of microelements. The measurement path includes temporal phase shifting interferometry for quantitative static shape elements analysis. This is followed by determination of the resonance frequency by means of modified time average interferometry and transient amplitude and phase maps of vibrating micromembrane capturing and evaluation by phase shifting stroboscopic interferometry. Proper application of combination of these methods allows for quick and accurate analysis of micromembranes and optimization of their manufacturing conditions.

Paper Details

Date Published: 17 August 2004
PDF: 9 pages
Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.545574
Show Author Affiliations
Leszek Salbut, Warsaw Univ. of Technology (Poland)
Jacek Kacperski, Warsaw Univ. of Technology (Poland)
Adam R. Styk, Warsaw Univ. of Technology (Poland)
Michal Jozwik, Warsaw Univ. of Technology (Poland)
Univ. de Franche-Comte (France)
Christophe Gorecki, Univ. de Franche-Comte (France)
Hakan Urey, Koc Univ. (Turkey)
Alain Jacobelli, Thales Research and Technology (France)
Thierry Dean, Thales Research and Technology (France)

Published in SPIE Proceedings Vol. 5458:
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki; Anand K. Asundi, Editor(s)

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