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Proceedings Paper

Tomographic microinterferometry of refractive index distribution
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Paper Abstract

Tomographic microinterferometry allows for a fast determination of the 3D refractive index distribution in optical elements. In this paper the limitations of this method due to diffraction effects at the edges of microelements or the steps in refractive index distribution inside objects with dimensions comparable to the wavelength are experimentally analyzed and by FDTD based simulations of reconstruction process. The other limitation considered refers to the deviation from a straight light propagation condition assumed in tomographic reconstruction. This problem is analyzed on the base of an experimental analysis of a 3D refractive index distribution in gradient index fiber optics and grin lens. The further modifications of tomographic microinterferometry in order to decrease these limitations are discussed.

Paper Details

Date Published: 17 August 2004
PDF: 12 pages
Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.545553
Show Author Affiliations
Pawel Kniazewski, Warsaw Univ. of Technology (Poland)
Malgorzata Kujawinska, Warsaw Univ. of Technology (Poland)
Heidi Ottevaere, Vrije Univ. Brussel (Belgium)
Hugo Thienpont, Vrije Univ. Brussel (Belgium)

Published in SPIE Proceedings Vol. 5458:
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki; Anand K. Asundi, Editor(s)

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