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Proceedings Paper

A surface micromachined tunable film bulk acoustic resonator
Author(s): Wanling Pan; Philippe Soussan; Bart Nauwelaers; Harrie A. C. Tilmans
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Paper Abstract

This paper reports on the design, modeling, fabrication and measurement of a novel-structured film bulk acoustic resonator (FBAR) that allows frequency tuning by MEMS actuation. FBAR's are micromachined frequency controlling devices working in RF regime. For many applications, a small range of tuning is desired to cope with drifts from different origins. To realize this functionality, it has been suggested to place tunable elements such as variable capacitors or inductors in the circuit. A conventional approach, in which an external element is used, would introduce parasitics and might seriously degrade the quality factor of the system. In contrast, our work integrates the piezoelectric resonating film and the tuning element to build a compact structure. By reducing possible parasitics and electrical resistance, this structure enables frequency tuning while maintaining a high quality factor.

Paper Details

Date Published: 16 August 2004
PDF: 8 pages
Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); doi: 10.1117/12.545532
Show Author Affiliations
Wanling Pan, Katholieke Univ. Leuven (Belgium)
IMEC (Belgium)
Philippe Soussan, IMEC (Belgium)
Bart Nauwelaers, Katholieke Univ. Leuven (Belgium)
Harrie A. C. Tilmans, IMEC (Belgium)


Published in SPIE Proceedings Vol. 5455:
MEMS, MOEMS, and Micromachining
Hakan Urey; Ayman El-Fatatry, Editor(s)

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