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Proceedings Paper

Application of the vortex transform to microscopic interferometry
Author(s): Sylvain Petitgrand; Alain Bosseboeuf; Matthieu Guirardel
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Paper Abstract

Interferogram analysis techniques able to compute phase or contrast maps from a single interferogram are useful for fast measurements of surface profiles, of out-of-plane displacement fields under thermal or mechanical loading, and of vibration mode shapes. Well known single interferogram techniques are Fast Fourier Transform (FFT) analysis, spatial carrier phase stepping and synchronous detection techniques. These techniques typically need a sample tilting to introduce a fringe spatial carrier and fail when the interferograms contain closed fringes. A 2D fringe pattern demodulation technique which overcomes these limitations is the Vortex Transform method proposed recently by K.G. Larkin et al. In this paper a fully automated version of this technique is described. Then it applied on real interferograms recorded on microdevices by microscopic homodyne interferometry is demonstrated.

Paper Details

Date Published: 17 August 2004
PDF: 7 pages
Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.545509
Show Author Affiliations
Sylvain Petitgrand, Univ. Paris XI (France)
Alain Bosseboeuf, Univ. Paris XI (France)
Matthieu Guirardel, LAAS, CNRS (France)

Published in SPIE Proceedings Vol. 5458:
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki; Anand K. Asundi, Editor(s)

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