Share Email Print
cover

Proceedings Paper

Micromachined tunable optical microfilters design and experimental processing
Author(s): Dana Cristea; Raluca Muller; Philippe Arguel; Mihai Kusko; Catalin Tibeica; Dimitrtis Syvridis
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

In this paper we present the design and the experiments performed to obtain a micromechanical voltage tunable Fabry-Perot interferometer integrated with a p-n photodiode on a silicon substrate. It can be used as a voltage tunable filter for the input radiation or as a voltage controlled attenuator to regulate the light from a monochromatic source. Different solution have been analyzed and experimented. The top mirror of the Fabry-Perot cavity is a doped poly-Si or Au/SiO2 movable membrane, electrostatically actuated, obtained using Si micromachining. A complex design process was performed: optical, electomechanical and technological. All these phases were performed interactively. Different materials were considered in order to perform an optimum design. Experimental micromachined interferometers were obtained using two techniques: (1) surface micromachining, and (2) anisotropic etching of (111)-oriented Si wafers, combined with an isotropic pre-etching step. These processes were optimized and matched to the photodiode fabrication process. Monolithic integrated interferometers coupled to p-n photodiodes were obtained.

Paper Details

Date Published: 16 August 2004
PDF: 12 pages
Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); doi: 10.1117/12.545470
Show Author Affiliations
Dana Cristea, National Institute for Research and Development in Microtechnologies (Romania)
Raluca Muller, National Institute for Research and Development in Microtechnologies (Romania)
Philippe Arguel, LAAS, CNRS (France)
Mihai Kusko, National Institute for Research and Development in Microtechnologies (Romania)
Catalin Tibeica, National Institute for Research and Development in Microtechnologies (Romania)
Dimitrtis Syvridis, Univ. of Athens (Greece)


Published in SPIE Proceedings Vol. 5455:
MEMS, MOEMS, and Micromachining
Hakan Urey; Ayman El-Fatatry, Editor(s)

© SPIE. Terms of Use
Back to Top