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Proceedings Paper

Studies of the properties of the temporal phase-shifting method applied to silicone microelement vibration investigations using the time-average method
Author(s): Krzysztof Patorski; Zbigniew Sienicki; Michal Pawlowski; Adam R. Styk; Agata Józwicka
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Paper Abstract

Numerical simulations of the influence the phase step miscalibration and average intensity differentiation between the frames on the calculated interferogram contrast using the temporal phase shifting method (TPS) are presented. The fringe function includes in its argument the amplitude of vibration studied by the time-average method. Some features of the TPS method known from the interferogram phase calculations are confirmed and properties characteristic to contrast determination are established. Experimental studies of vibration resonant mode patterns of silicone microelements provide corroboration of theoretical and numerical findings.

Paper Details

Date Published: 17 August 2004
PDF: 12 pages
Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.545450
Show Author Affiliations
Krzysztof Patorski, Warsaw Univ. of Technology (Poland)
Zbigniew Sienicki, Warsaw Univ. of Technology (Poland)
Michal Pawlowski, Warsaw Univ. of Technology (Poland)
Adam R. Styk, Warsaw Univ. of Technology (Poland)
Agata Józwicka, Warsaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 5458:
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki; Anand K. Asundi, Editor(s)

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