Share Email Print
cover

Proceedings Paper

Cost-effective fabrication of waveguides for PLCs by replication in UV-curable sol-gel material
Author(s): Christiane Gimkiewicz; Hans D. Thiele; Christian Zschokke; Sanida Mahmud-Skender; Susanne Westenhofer; Michael T. Gale
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A new wafer-scale replication process for fabricating buried ridge waveguides for telecom/datacom applications using an uv-curable sol-gel material is proposed. Spin coating of the core material on the replication mould is used to form the waveguide cores with a smooth thin layer. The spin parameters allow an accurate control of the thickness and homogeneity. The bottom-cladding is uv-cast between a substrate and the mould, which is covered by the spun core layer. The ridge waveguide cores are demoulded and buried under a top cladding. This process allows the stacking of several layers of waveguides on top of each other to form two-dimensional waveguide arrays. A specially adapted SUSS mask aligner is used to control the cladding thickness between individual waveguide layers and to align them. A waveguide loss comparable to lithographically fabricated waveguides has been achieved.

Paper Details

Date Published: 18 August 2004
PDF: 10 pages
Proc. SPIE 5451, Integrated Optics and Photonic Integrated Circuits, (18 August 2004); doi: 10.1117/12.545410
Show Author Affiliations
Christiane Gimkiewicz, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Hans D. Thiele, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Christian Zschokke, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Sanida Mahmud-Skender, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Susanne Westenhofer, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)
Michael T. Gale, Ctr. Suisse d'Electronique et de Microtechnique SA (Switzerland)


Published in SPIE Proceedings Vol. 5451:
Integrated Optics and Photonic Integrated Circuits
Giancarlo C. Righini; Seppo Honkanen, Editor(s)

© SPIE. Terms of Use
Back to Top