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Proceedings Paper

Confocal micro-optical distance sensor for precision metrology
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Paper Abstract

Increasing demands for controlling tolerances of small mechanical and optical components require improved measurement techniques. In particular, components with a complex geometry such as small holes or channels are difficult to access by classical tactile measurement systems. These systems are also limited in their measurement speed. Optical distance sensors do not have many of these disadvantages, but the sensor heads are normally too large to access e.g. small holes. Presented in this paper is a novel microoptical sensor concept using the chromatic confocal principle for distance gauging applications. This is used in high aspect ratio cavities with a diameter of about 2 mm. The distance resolution of the sensor is aimed to be in the sub-micrometer range.

Paper Details

Date Published: 1 September 2004
PDF: 5 pages
Proc. SPIE 5459, Optical Sensing, (1 September 2004); doi: 10.1117/12.545404
Show Author Affiliations
Peter Luecke, Forschungszentrum Karlsruhe GmbH (Germany)
Arndt Last, Forschungszentrum Karlsruhe GmbH (Germany)
Juergen Mohr, Forschungszentrum Karlsruhe GmbH (Germany)
Aiko Ruprecht, Univ. Stuttgart (Germany)
Wolfgang Osten, Univ. Stuttgart (Germany)
Hans J. Tiziani, Univ. Stuttgart (Germany)
Peter Lehmann, Mahr GmbH (Germany)

Published in SPIE Proceedings Vol. 5459:
Optical Sensing
Brian Culshaw; Anna Grazia Mignani; Rainer Riesenberg, Editor(s)

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