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Proceedings Paper

Sensitivity-tunable interferometric system based on surface plasmon resonance
Author(s): Chien-Ming Wu; Ming-Chi Pao
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Paper Abstract

We present an improved interferometric system based on surface plasmon resonance (SPR) and phase detection. The system incorporates a SPR device and a total internal reflection (TIR) device used not only to enhance the relative phase-shift between the TE and TM waves but also to keep the output beam to be anti-parallel to the input beam. A pair of quarter-wave-plates (QWPs) is placed in front of and behind, respectively, to the system. This gives rise to optimize the response curve and then the sensitivity. Theoretical simulations have been developed and verified by experimental results. By using this new design, we can always get the best sensitivity regardless weather the systems are manufactured in perfect conditions or not.

Paper Details

Date Published: 17 August 2004
PDF: 8 pages
Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.545327
Show Author Affiliations
Chien-Ming Wu, National Tsing Hua Univ. (Taiwan)
Ming-Chi Pao, National Tsing Hua Univ. (Taiwan)


Published in SPIE Proceedings Vol. 5458:
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki; Anand K. Asundi, Editor(s)

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